Evatec Ag

Stephan Voser

Martin Dubs

Gerhard Dovids

Bruno Gaechter

Fabio Antonio Ravelli

Pierre Matteacci

Gerald Feistritzer

Volker Wüstenhagen

An apparatus to coat at least one three-dimensional (3D) object. The apparatus includes: a coating chamber; a vacuum pump system; a chamber port; and a rotatable object holder. The holder has a rotational axis Z. At least two rotary cathodes are positioned in the chamber. Each cathode includes a hollow cylindrical rotary target having a rotary axis Y. A magnetic system is swivel or rotary mounted round axis Y and positioned neighboring to an inner diameter surface of the target. At least one power supply is provided for the target. The targets of the at least two rotary cathodes are positioned round the holder, with their axes Y, Ytransverse to axis Z, both being offset to the holder in a z-direction, and being offset to each other in a direction along axis Z on opposite sides of an object plane O which is vertical to axis Z.

Sputtering apparatus for coating of 3D-objects

A method of manufacturing substrates using a transport and handing-over arrangement for disc shaped substrates, including a carrier and a take-over arrangement. A substrate carrier of magnetisable material has a peripheral protruding rim. An untreated substrate lies in the substrate carrier below the rim. The substrate carrier is taken-over from the take-over arrangement by controlling a distance between a permanent magnet and the substrate carrier and transported from to a treatment station. The controlled drive of the permanent magnets in the take-over arrangement is performed by means of pneumatic piston/cylinder arrangements.

Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substrates

Liquid precursor material of a coating substance and a solvent is provided in a reservoir (STEP, STEP'). In one variant the liquid precursor material is distilled (STEP), the resultant liquid coating substance is vaporized (STEP) and ejected through a vapor distribution nozzle arrangement () into a vacuum recipient () and onto substrateto be coated. Alternatively, the liquid precursor material is directly vaporized (STEP&#x2032;). From the two-component vapor coating substance vapor is applied to substrate&#x2032; to be coated. In this variant separation of solvent vapor and coating substance vapor is performed especially downstream vaporizing (STEP&#x2032;).

Direct liquid deposition

A transport and handing-over arrangement for disc shaped substrates, comprising a carrier () and a take-over arrangement (). Both are moveable relative to each other. A relatively heavy substrate carrier () of magnetizable material is taken-over from the take-over arrangement () by distance control of a permanent magnet () at the take-over arrangement () or is returned therefrom to a carrier (). The controlled drive of the permanent magnets () in the take-over arrangement () is performed by means of pneumatic piston/cylinder arrangements ().

Growing community of inventors

Sevelen, Switzerland

Stephan Voser