Dcg Systems Gmbh

Stephan Schoemann

Theodore R Lundquist

Chun-Cheng Tsao

Christian Boit

Uwe Jürgen Kerst

Peter Sadewater

Localized trenches or access holes are milled in a semiconductor substrate to define access points to structures of an integrated circuit intended for circuit editing. A conductor is deposited, such as with a focused ion beam tool, in the access holes and a localized heat is applied to the conductor for silicide formation, especially at the boundary between a semiconductor structure, such as diffusion regions, and the deposited conductor. Localized heat may be generated at the target location through precise laser application, current generation through the target location, or a combination thereof.

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Freising, Germany

Stephan Schoemann