Average Co-Inventor Count = 10.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl-zeiss-smt Ag (1 from 461 patents)
2. Carl Zeiss Smt Gmbh (1,410 patents)
1 patent:
1. 7646004 - Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element