Asml Netherlands B.v.

Stephan Koelink

Marcel Beckers

Nicolas Alban Lallemant

David Theodorus Willy Van Der Plas

Martinus Cornelis Maria Verhagen

Pascal Antonius Smits

Ronald Stultiens

Wladimir Fransiscus Gerardus Maria Hertog

Henk Krus

Rob Jansen

Wladimir Franciscus Gerardus Maria Hertog

A lithographic apparatus is disclosed. The apparatus includes an illuminator for conditioning a beam of radiation, and a first support for supporting a patterning device that serves to pattern the beam of radiation according to a desired pattern. The apparatus also includes a second support for supporting a substrate, a projection system for projecting the patterned beam onto a target portion of the substrate, and at least one gas generator for generating a conditioned gas flow. The gas generator includes a guiding element for guiding the gas flow to a lower volume generally located below a lower surface of the projection system and to a volume between the lower surface and the substrate. The guiding element directs the gas flow in a generally downward direction and then in a direction generally parallel to the lower surface.

Lithographic apparatus and device manufacturing method

A lithographic apparatus includes a radiation system for providing a beam of radiation, and a first support for supporting a patterning device. The patterning device serves to pattern the beam of radiation. The apparatus includes a second support for supporting a substrate, a projection system for projecting the patterned beam onto a target portion of the substrate, and an interferometer measurement system for providing an interferometric measurement beam extending along an axis in an elongated volume of gas extending below the projection system. The apparatus also includes a gas conditioning structure for providing a conditioned gas flow in the volume. The gas conditioning structure includes a plurality of gas guiding vanes disposed at an outlet of the structure for guiding the gas flow to the volume. The gas guiding vanes are shaped continuously and are oriented diverging away from the axis of the volume.

Lithographic apparatus

Growing community of inventors

Eindhoven, Netherlands

Stephan Koelink