Albert-ludwigs-universitaet Freiburg

Oerlikon Trading Ag, Trubbach

Oerlikon Trading Ag, Truebbach

Fachhochschule Vorarlberg Gmbh

Oerlikon Surface Solutions Ag, Pfaffikon

Newport Corporation

Oerlikon Surface Solutions Ag, Trubbach

Stephan Kasemann

Siegfried Krassnitzer

Jürgen Ramm

Beno Widrig

Juergen Ramm

Orlaw Massler

Gerald Urban

Mario Wolfgang Walch

Arno Moosbrugger

Jürgen Gwehenberger

Jochen Kieninger

Barbara Hanselmann

Frank Hendricks

Victor Matylitsky

Marcelo Dornelles Pimenta

Stefan Partel

Can Dincer

Jüergen Ramm

Mario Walch

Elisabeth Kostal

Matthias Domke

Sandra Stroj

Juergen Gwehenberger

A method of manufacturing an electrode structure includes providing an initial structure, the initial structure including at least two elevated regions extending from a substrate, wherein top portions of the two elevated regions are separated by a first lateral distance, depositing material onto the elevated regions by means of physical vapor deposition such that adjacent top portions of the deposited material are separated by a second lateral distance that is smaller than the first lateral distance, and applying electrodes onto the top portions of the material.

Electrode structure and method of manufacturing an electrode structure

The present invention relates to a pretreatment method to be applied to secondary surfaces in coating systems prior to coating. To this end, a non-stick coating is applied to the secondary surfaces, which can be easily detached from the secondary surfaces, even after coating material has been deposited thereon. In this way, the cleaning process of the coating system after the coating process is considerably simplified.

Cleaning method for coating systems

Vacuum treatment installation or vacuum treatment method for carrying out a plasma method, wherein the treatment is carried out in a vacuum chamber, in which are disposed a device for generating an electric low voltage arc discharge (NVBE) comprised of a cathode and an anode electrically interconnectable with the cathode via an arc generator, and a workpiece carrier electrically interconnectable with a bias generator for receiving and moving workpieces, as well as at least one feed for inert and/or reactive gas. At least a portion of the surface of the anode is therein fabricated of graphite and is operated at high temperature.

Vacuum treatment installation and vacuum treatment method

Growing community of inventors

Feldkirch, Austria

Stephan Kasemann