Tel Solar Ag

Oerlikon Solar Ag, Trubbach

Stephan Jost

Andreas Belinger

Laurent Delaunay

An electrode () of a radiofrequency parallel plate plasma reactor includes an electrode surface of a multitude of surfaces of metal members () which reside on dielectric spacing members (), whereby the metal members () are mounted in an electrically floating manner. The dielectric members () are mounted, opposite to the metal members (), upon a metal Rf supply body ().

Radiofrequency plasma reactor and method for manufacturing vacuum process treated substrates

A large surface substrate () is Rf vacuum plasma treated with the help of an electrode arrangement () consisting of an even number of electrode strips (). At least one of the strips is Rf supplied at least two distinct loci (P, P) along the central axis (A) of the addressed strip ().

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Azmoos, Switzerland

Stephan Jost