Asml Netherlands B.v.

Stephan Christiaan Quintus Libourel

Hans Butler

Wilhelmus Franciscus Johannes Simons

Maurice Willem Jozef Etiënne Wijckmans

Martinus Van Duijnhoven

Hendrikus Herman Marie Cox

Mark Scholten

Dave Braaksma

Jacob Kleijn

René Wilhelmus Antonius Hubertus Leenaars

Mark Petrus Ubbink

The present invention relates to a positioning system, including: a first actuator to exert an actuation force on a moveable body, the first actuator being coupled to a balance mass configured to absorb a reaction force resulting from the actuation force, the actuation force providing an acceleration of the moveable body and the reaction force providing an acceleration of the balance mass, wherein a force resulting from the acceleration of the moveable body together with a force resulting from the acceleration of the balance mass result in a balance mass torque; a balance mass support to support the balance mass onto a frame, which balance mass support engages the frame at a support position; and a torque compensator; wherein the torque compensator exerts a compensation force to compensate the balance mass torque, and wherein the torque compensator exerts the compensation force on the frame at the support position.

Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method

A lithographic apparatus includes an illumination system configured to condition a radiation beam and a support constructed to support a patterning device. The patterning device may be capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam. The lithographic apparatus further includes a substrate table constructed to hold a substrate and a projection system configured to project the patterned radiation beam onto a target portion of the substrate. The lithographic apparatus may be provided with a composite material wherein a layer of carbon fiber and a layer of titanium is provided within the composite.

Lithographic apparatus, composite material and manufacturing method

Growing community of inventors

Veldhoven, Netherlands

Stephan Christiaan Quintus Libourel