Carl Zeiss Smt Gmbh

Carl-zeiss-smt Ag

Stephan Back

Guido Limbach

Julian Kaller

Guido Soyez

Harald Woelfle

Joachim Buechele

Hubert Holderer

Ulrich Weber

Alexander Kohl

Johannes Lippert

Juergen Fischer

Wolfgang Hummel

Jochen Weber

Michael Muehlbeyer

Thorsten Rassel

Karl-Eugen Aubele

Erich Merz

Klaus Rief

Baerbel Schwaer

Raoul Reiner

Markus Neumaier

Stefan Schoengart

An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. An associated method of inserting or removing an optical element into or from a receiving region in a housing is also disclosed.

Lens module comprising at least one exchangeable optical element

An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. Alternatively or in addition, the optical system has a gas lock that receives the optical element. The opening interconnects the gas lock and the receiving region of the housing, and accommodates passage of the optical element between the gas lock and the receiving region.

Disclosed is a lens module, especially a projection lens for semiconductor lithography, comprising at least one replaceable optical element that is disposed in a lens housing. At least one gas exchange device is positioned in an area of the replaceable optical element in such a way that a receiving zone for the replaceable optical element can be flushed when the optical element is replaced.

An imaging device in a projection exposure machine for microlithography includes at least one optical element and at least one manipulator, a linear drive for manipulating the position of the optical element. The linear drive has at least one moving element, the moving element having a shearing part and a lifting part. The shearing part is arranged to move the optical element and the lifting part is arranged to move the shearing part. The linear drive has a supporting element which is in contact with and prevents movement of the optical element while the shearing part is moved by the lifting part.

Imaging device in a projection exposure machine

Growing community of inventors

Langenau, Germany

Stephan Back