Precitec Optronik Gmbh

Carl Zeiss Smt Gmbh

Stephan André

Toralf Gruner

Norbert Wabra

Johannes Ruoff

Martin Schönleber

Christoph Dietz

Daniel Golde

Sonja Schneider

Jean-Francois Pichot

Martin SCHÖNLEBER

Ricarda SCHÖMER

A device for measuring a distance to an object comprises a beam splitter for splitting broadband coherent light emitted by a light source in measuring light which is guided through an object arm to the object to be measured and in reference light which is guided to a reference arm. The object arm includes a focusing optics with a focus movable along an optical axis of the object arm. The focusing optics comprises a movable optical element and is configured such that a movement of the movable optical element along the optical axis causes a higher movement of the focus of the focusing optics along the optical axis. The movable optical element of the focusing optics is coupled to the reference arm such that the optical path length of the reference arm can be tracked synchronously with and dependent on the movement of the focus of the focusing optics.

Distance measuring device and method for measuring distances

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Rodgau, Germany

Stephan André