Micronic Laser Systems Ab

Saabtech Electronics Ab

Sten Lindau

Torbjörn Sandström

Torbjorn E Sandstrom

Lars Ivansen

Anders Osterberg

The technology disclosed relates to scanning of large flat substrates for reading and writing images. Examples are flat panel displays, PCB's and photovoltaic panels. Reading and writing is to be understood in a broad sense: reading may mean microscopy, inspection, metrology, spectroscopy, interferometry, scatterometry, etc. of a large workpiece, and writing may mean exposing a photoresist, annealing by optical heating, ablating, or creating any other change to the surface by an optical beam. In particular, we disclose a technology that uses a rotating or swinging arm that describes an arc across a workpiece as it scans, instead of following a traditional straight-line motion.

Method and device using rotating printing arm to project or view image across a workpiece

The technology disclosed relates to variable tapers to resolve varying overlaps between adjacent strips that are lithographically printed. Technology disclosed combines an aperture taper function with the variable overlap taper function to transform data and compensate for varying overlaps. The variable taper function varies according to overlap variation, including variation resulting from workpiece distortions, rotor arm position, or which rotor arm printed the last stripe. Particular aspects of the present invention are described in the claims, specification and drawings.

Variable overlap method and device for stitching together lithographic stripes

A quantum well based two-dimensional detector () for detecting infrared radiation which receives infrared radiation falling upon its detector surface () at various angles of incidence. The detector comprises a grating arrangement for diffraction of the incident radiation. The arrangement is selected with a grating interval which varies or changes from the central part of the detector. out towards the outer parts of the detector. The variation or change in the grating interval is arranged to retain in the detection diffracted rays of the orders 1 and &#x2212;1 as active components over the whole detector surface by changing the angle values of the diffracted rays depending upon the angles of incidence of the radiation falling on various parts of the detector surface.

Quantum well based two-dimensional detector for IR radiation and camera system with such a detector

An optomechanical deflector for a line display unit ( ) comprises ocular and objective functions ( ) and also a component or components for sweep-generation ( ) and image turning. Each respective sweep-generating component ( ) can be positioned at a distance (B) upwards and/or to the side of one or both eye(s) ( ). By means of one or more first mirror surfaces ( ), the sweep-generating component reflects incoming radiation ( ) from the line display unit ( ) to one or more second mirror surface(s) ( ), which form(s) part of the objective function, on a component arranged in a rotationally fixed manner. Each respective second mirror surface in turn reflects radiation ( ) towards a mirror surface ( ) or mirror surfaces forming part of the ocular function, which reproduce(s) the respective first mirror surface for the pupil(s) ( ) of the eye(s). In an alternative embodiment, the sweep-generating component and the rotationally fixed component have changed places.

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Taby, Sweden

Sten Lindau