Deutsche Solar Gmbh

Fabmatics Gmbh

Handhabungs-, Automatisierungs- Und Praezisionstechnik Gmbh

Hap Handhabungs-, Automatisierungs- Und Präzisionstechnik Gmbh

Steffen Pollack

Holger Brosche

Hans-Joachim Gretzschel

Matthias Reinecke

Jürgen Döpping

Stefan Richter

Cornelius Günther

Sven Schirmer

Heinz-Martin Esser

Siegfried Ickert

Lothar Andritzke

Steffen Krueger

Wilfried Krause

Klaus-Peter Weiss

Carsten Grunert

Bernhard Stein

Udo Scheller

An interface device for a purging unit for purging a wafer container with a purging gas, which comprises a contact piece for contacting a purging interface of a wafer container, wherein the contact piece is movably arranged in the purging unit and has a gas passage in its interior. A corresponding interface device is provided. The object is to specify an interface device which, when the wafer container is coupled to the purging unit, makes it possible to seal a gas inlet or a gas outlet, to introduce or to discharge a purging gas into the wafer container, thereby compensating for and adapting to vertical and horizontal movements, preventing wear, and fulfilling a passive coupling and sealing function as well as offering maximum durability and reliability. This is achieved by a contact piece which is suspended directly or indirectly in the purging unit by means of a spring device.

Interface device for a purging unit for purging a wafer container

An apparatus for manipulating articles in which a multiaxial industrial robot is arranged on a travel unit and the industrial robot and the travel unit can be supplied with electrical energy via an energy storage unit. The travel unit has a control unit and at least three wheels having at least one drive unit, with the control unit being configured to rotate at least one of the wheels by the drive unit about an axis of rotation standing perpendicular on a symmetrical axis of rotation of the wheel and to rotate it about the symmetrical axis of rotation by the respective drive unit so that the apparatus can be moved in any direction by the travel unit. In addition, area monitoring sensors are arranged on at least two sides of the travel unit to monitor a virtual surface located at a predefined spacing next to and not intersecting the travel unit.

Mobile device for manipulating objects

The invention relates to a device for catching a plurality of slices to be detached from a holding element, having a frame, a holder, attached to the frame, for accommodating the holding element holding the slices, at least two guiding elements on the sides and at least one bottom catching element, the guiding elements on the sides each being arranged on the frame in pairs on the right and the left.

Wafer catching device

An apparatus and a method for the removal of pellicles from masks which can be used for photolithographic purposes. The pellicles are removed from masks in a universal manner without them being further contaminated or damaged. In an apparatus, at least one grip is present for the manipulation of masks provided with pellicles which has at least two fixing elements which engage at the edge of a mask with exerted pressure force. There are moreover present in this connection at least one detector for the contactless determination of the position of mounts formed at the radially outer edge of pellicles, and a heating device for the heating of an adhesive with which pellicles are fastened to a mask with material continuity, and a removal apparatus of the pellicles from a mask having a mask fixing unit and a pellicle removal unit.

Apparatus and method for the removal of pellicles from masks

The invention relates to a device for manufacturing semiconductor material wafers with a sawing device for the sawing of slices attached to a saw holder, a pre-cleaning device arranged in the process direction downstream of the sawing device for pre-cleaning the surfaces of the slices hanging on the saw holder, and a degluing device arranged downstream in the process direction for detaching the slices from the saw holder.

Wafer manufacturing method and device

Growing community of inventors

Dresden, Germany

Steffen Pollack