Carl Zeiss Microscopy Gmbh

Steffen Niederberger

Dirk Preikszas

Gerd Ludwig Benner

Stefan Meyer

A particle beam microscope comprises a magnetic lenshaving an optical axisand a pole piece. An objectto be examined is mounted at a point of intersectionbetween an optical axisand the object plane. First and second X-ray detectorshave first and second radiation-sensitive substratesarranged such that a first elevation angle &#x3b2;between a first straight lineextending through the point of intersectionand a center of the first substrateand the object planediffers from a second elevation angle &#x3b2;between a second straight lineextending through the point of intersectionand a center of the second substrateand the object planeby more than 14&#xb0;.

Growing community of inventors

Gerstetten, Germany

Steffen Niederberger