Carl Zeiss Smt Gmbh

Fresenius Medical Care Deutschland Gmbh

Steffen Fritzsche

Klaus Heilmann

Gerhard Breith

Rolf Freimann

Igor Raiko

Juergen Baier

Uwe Hahmann

Roland Sander

Hendrik Wagner

Florian Ahles

Christian Sauerwald

Norbert Wabra

Boris Bittner

Sonja Schneider

Ricarda Schoemer

Jens Prochnau

Marwène Nefzi

Walter Pauls

Willi Heintel

Ralf Zweering

Christian Wald

Michael Erath

Viktor Kulitzki

Peter Nieland

Johann Dorn

Wolfgang Grimm

Frederik Schrod

Jürgen Baier

The disclosure provides an optical system, having a first optical control loop, which is set up to regulate a position and/or spatial orientation of a first optical element relative to a first module sensor frame, and a first module control loop, which is set up to regulate a position and/or spatial orientation of the first module sensor frame relative to a base sensor frame. Related components and methods are also provided.

Optical system

An optical arrangement, for example a lithography system, includes: a first component, in particular a carrying frame; a second component, in particular a mirror, which is movable in relation to the first component; and at least one stop with at least one stop face for limiting the movement of the second component in relation to the first component. The optical arrangement, preferably the stop, can have a fixing device for fixing the second component. The fixing device can have a fixing element that is movable in relation to the stop face of the stop. Further aspects of the device likewise relate to an optical arrangement with a fixing device or with a transport lock.

Optical arrangement, in particular lithography system, with a transport lock

A method for producing a lens for a lithography apparatus is disclosed. A measurement system for ascertaining an optical characteristic of a partial lens for a lithography apparatus is also disclosed.

Method for producing a lens for a lithography apparatus, and measurement system

An optical assembly, in particular for a lithography system for imaging lithographic micro- or nanostructures, includes at least two optical elements arranged successively in a beam path of the optical assembly, an acquisition device designed to acquire radiation signals from marking elements on or at the at least two optical elements, and a control device coupled to the acquisition device and which is designed to determine the plurality of properties of the optically active surface of the at least two optical elements as a function of the information contained in the radiation signals originating from the marking elements. The disclosure also relates to a method for operating the optical assembly.

Optical assembly

The disclosure relates to an optical assembly for a projection exposure apparatus for semiconductor lithography. The optical assembly includes at least one optical element and a mounting body for mechanically fixing the element in a supporting structure. The optical assembly also includes at least one cooling body for dissipating heat from the element. The mounting body and the cooling body are separate from one another. The optical element is connected to the cooling body via at least one heat-conducting element. The disclosure also relates to a projection exposure apparatus including an optical assembly according to the disclosure.

Optical element

The invention relates to a filter device, preferably for hemodialysis, that consists of a cylindrical filter housing and a bundle of curled hollow fibers. The bundle is arranged in the filter housing. According to the invention, the curled hollow fibers are provided with an essentially sinusoidal texture and a wavelength that is defined by means of certain limits. The invention also relates to a curled hollow fiber and a method for filling a hollow fiber dialyser.

Filter device, preferably a hollow fiber dialyser with curled hollow fibers

A hollow fiber filter device for dialysis having a housing and an end cap is described. The end cap is attached to an axial end of the housing, and has a curved channel in fluid communication with a fluid port, a fluid chamber having a flow path defined by a plurality of curved members connected to an upper interior surface. The distance between circumferentially adjacent curved members may decrease in a radially outward flow direction.

Filter device

A closure element for sterile closure of connections, in particular connections of filter modules for dialysis, hemofiltration or ultrafiltration is described. A closure element with a simple design that provides a reliable seal is formed by having the closure element include a wall with an automatically closing slit-shaped indentation which when closed creates a germ-proof seal. The sealing element is used for sterile closure of connections of medical items, as well as for the medical items themselves.

Filter module having a closure element

A filter device for mass exchange between two media separated by a membrane is disclosed. The device provides for low-stress transfer of blood flow from the connection area of the filter device to the fibers of a hollow fiber bundle. Relatively uniform utilization of the fibers is provided by a membrane in the form of a hollow fiber bundle whose fiber cavities form a first flow space. At least one inflow or outflow chamber is connected to the first flow space for supplying a medium to the hollow fiber bundle or removing a medium from the hollow fiber bundle. The inflow or outflow chamber is adjacent to an essentially circular or semicircular channel which is designed to be open in the direction of the ends of the hollow fibers and is connected to an inlet or outlet of the filter device. The channel is arranged approximately centrally with the hollow fiber bundle.

Closure element

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Aalen, Germany

Steffen Fritzsche