Centre National De La Recherche Scientifique

Université Paris-Sud 11

Stefano Mazzucco

Marcel Tence

Mathieu Kociak

Luiz Fernando Zagonel

The invention relates to a cathodoluminescence detection system comprising: a collecting optic () collecting light radiation () from a sample illuminated by a beam of charged particles and reflecting said radiation () onto analysis means, said collecting optic () being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means () for adapting the light radiation, placed downstream of the collecting optic () and designed to adapt said light radiation () at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means () is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.

Cathodoluminescence detector including inner and outer tubes sealed from a vacuum chamber of an associated particle beam system

A cathodoluminescence detection system is provided, including

Adjustable cathodoluminescence detection system and microscope employing such a system

A cathodoluminescence detection system is provided, including a collection optic collecting light radiation coming from a sample illuminated by a charged particle beam and sending the light radiation to an analyzer, a positioner for the collection optic; the positioner including several translation components of the collection optic. Each translation component effects the translation of the collection optic in one dimension of space so that the translation components effect the translation of the collection optic in several dimensions of space.

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Bethesda, MD, United States of America

Stefano Mazzucco