Atotech Deutschland Gmbh

Stefan Vitzthum

Ralph Rauenbusch

Tobias Bussenius

This invention concerns a substrate holder reception apparatus () for clamping a substrate holder () in a substrate holder clamping direction (SHCD) in a predetermined position of the substrate holder () and releasing the substrate holder (), comprising at least one substrate holder connection device () for mechanical aligning and electrically contacting of the substrate holder (), wherein the substrate holder connection device () comprises a separate substrate holder alignment device () for aligning the substrate holder () with the substrate holder connection device () in an alignment direction, and a separate substrate holder contact device () for electrically contacting the substrate holder (). Further, the invention concerns an electrochemical treatment apparatus () comprising the substrate holder reception apparatus ().

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Burgthann, Germany

Stefan Vitzthum