Globalfoundries Inc.

Stefan Thierbach

Daniel Fischer

Peter Moll

Carsten Hartig

Matthias Ruhm

Guido Überreiter

Stefan Rongen

Martin Schmidt

Andreas Schuring

Methods for in-die overlay reticle measurement and the resulting devices are disclosed. Embodiments include providing parallel structures in a first layer on a substrate; determining measurement sites, in a second layer above the first layer, void of active integrated circuit elements; forming overlay trenches, in the measurement sites and parallel to the structures, exposing sections of the structures, wherein each overlay trench is aligned over a structure and over spaces between the structure and adjacent structures; determining a trench center-of-gravity of an overlay trench; determining a structure center-of-gravity of a structure exposed in the overlay trench; and determining an overlay parameter based on a difference between the trench center-of-gravity and the structure center-of-gravity.

Method for in-die overlay control using FEOL dummy fill layer

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Dresden, Germany

Stefan Thierbach