Huettinger Elektronik Gmbh & Co. Kg

Stefan Schirmaier

Peter Wiedemuth

Markus Winterhalter

A method of generating an output DC voltage of a gas discharge process voltage supply unit, in which in a first voltage transformation stage a first DC voltage is transformed into a second DC voltage of a predetermined voltage range, and the output DC voltage is generated from the second DC voltage in a second voltage transformation stage. A switching element of at least one boost converter is switched with a controlled pulse-duty factor for generating the output DC voltage in the second voltage transformation stage. This method permits striking and maintenance of a plasma process.

Generating an output DC voltage with a boost converter having a controlled pulse-duty factor

A current supply system includes one or more, or a plurality of current supply modules that each includes an input terminal and an output terminal and that each has a maximum output power. Multiple current supply modules are electrically combined to form a current supply unit having a maximum output power that is greater than the maximum output power of the individual current supply modules, and a control unit is connected to the current supply unit. A data connection connects the control unit to all the current supply modules of the current supply unit.

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Freiburg, Germany

Stefan Schirmaier