Carl Zeiss Smt Gmbh

Stefan Schaff

Markus Deguenther

Daniel Runde

Christian Wald

Bernhard Gellrich

Jens Prochnau

Marwène Nefzi

Axel Lorenz

Ralf Zweering

Michael Erath

Viktor Kulitzki

Charles Seviour

An optical arrangement, in particular a lithography system, includes: a movable component, in particular a mirror; at least one actuator for moving the component; and at least one stop having a stop face for delimiting the movement of the component. The optical arrangement further includes, on a stop or on a plurality of stops, at least two stop faces for delimiting the movement of the movable component in one and the same movement direction.

Optical arrangement, in particular lithography system

An optical waveguide serves for guiding illumination light. The waveguide has a waveguide main body for guiding the illumination light between a main body entrance region and a main body exit region. At least one coupling-out device is provided in the main body exit region. Via the coupling-out device, at least one coupling-out illumination light partial beam is coupled out from the illumination light emerging from the waveguide main body. This is done such that the coupling-out illumination light partial beam can be separated from the rest of the illumination light beam emerging from the waveguide main body. This results in a waveguide having improved possibilities for use when guiding illumination light.

Optical waveguide for guiding illumination light

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Ellwangen, Germany

Stefan Schaff