Endress + Hauser Gmbh + Co. Kg

Endress+hauserse+co. Kg

Stefan Rummele-Werner

Armin Wernet

Kaj Uppenkamp

Gerd Bechtel

Rafael Teipen

Benjamin Lemke

Lars Karweck

Thomas Zieringer

Timo Kober

A high-precision pressure sensor, having a first base body that has two electrically conductive layers and an insulation layer arranged between the two layers and electrically insulating the two layers from one another, an electrically conductive measurement membrane arranged on the first base body with inclusion of a pressure chamber, which measurement membrane can be charged with a pressure to be measured, and an electrode provided in the membrane-facing layer and spaced apart from the measurement membrane, which electrode together with the measurement membrane forms a capacitor having a capacitance that varies according to the pressure acting upon the measurement membrane. The first base body is characterized in that it has a measurement membrane terminal via which a reference potential can be applied to the measurement membrane, an electrode terminal via which an electrode potential of the electrode can be tapped, and a shield terminal via which a shield potential that can be predetermined independently of the reference potential especially, a shield potential corresponding to the electrode potential can be applied to the layer facing away from the membrane.

Capacitive pressure sensor and method for its production

A signal generator for producing periodic signals for a measuring apparatus of automation technology. The signals have sequential, discrete signal frequencies, which lie within a predetermined frequency range. A control- and/or computing unit, a clock signal producer are provided, wherein the clock signal producer provides a constant sampling frequency, which is greater than the maximum discrete signal frequency in the predetermined frequency range. A memory unit is provided, in which for each of the discrete signal frequencies the amplitude values of the corresponding periodic signals are stored or storable as a function of the sampling frequency. The control- and/or computing unit reads out the stored or storable amplitude values of the discrete frequencies successively with the sampling frequency of the clock from the memory unit and produces the periodic signals, or forwards for producing. A static filter unit, is also provided with a limit frequency, which lies above the maximum signal frequency and which removes frequency fractions caused by the sampling.

Signal generator for a measuring apparatus and measuring apparatus for automation technology

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Lorrach, Germany

Stefan Rummele-Werner