Evatec Ag

Stefan Rhyner

Martin Bless

Rf power is supplied to a vacuum processing module in that in the plasma processing module a time invariant impedance transform is performed by an impedance transform network in the plasma processing module and a time variable matching is performed by a matchbox connected to the impedance transform network. The impedance transform network includes an inductive element of a hollow conductor. A cooling medium is flown through the hollow conductor of the impedance transform network as well as through a part of the plasma processing module to be cooled and not being part of the impedance transform network at the plasma processing module.

Growing community of inventors

Buchs, Switzerland

Stefan Rhyner