Ctf Solar Gmbh

China Thumph International Engineering Co., Ltd.

China Triumpf International Engineering Co. Ltd.

Stefan Rau

Shou Peng

Bastian Siepchen

Michael Harr

Xinjian Yin

Ganhua Fu

Christian Kraft

The present invention relates to a method and an apparatus for determining the position of a substrate within a closed chamber, wherein the substrate is moved within the chamber by a transport system comprising at least one rotating shaft. A load-converting element is provided adjacent to at least one of the rotating shafts, wherein the load-converting element detects a load acting on the at least one rotating shaft and converts it into an electrical parameter. While no substrate is present on the at least one rotating shaft, a first output signal corresponding to a first value of the electrical parameter is measured. The output signal is then monitored and a presence of the substrate on the at least one rotating shaft is detected when the output signal differs from the first output signal by at least a predetermined amount.

Method for determining a substrate position in a closed chamber and apparatus for performing the method

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Dresden, Germany

Stefan Rau