Carl Zeiss Microscopy Gmbh

Carl Zeiss Nts Gmbh

Stefan Martens

Holger Doemer

Walter Mack

A processing system includes a particle beam column for generating a particle beam directed to a first processing location; a laser system for generating a laser beam directed to a second processing location located at a distance from the first processing location; and a protector including an actuator and a plate connected to the actuator. The actuator is configured to move the plate between a first position in which it protects a component of the particle beam column from particles released from the object by the laser beam and a second position in which the component of the particle beam column is not protected from particles released from the object by the laser beam.

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Woellstein, Germany

Stefan Martens