Robert Boschgmbh

Stefan Mark

Joerg Muchow

Helmut Grutzeck

Thorsten Balslink

Rainer Straub

Corinna Koepernik

Stefan Pinter

Frank Schatz

Mirko Hattass

Hans-Jochen Schwarz

Frederic Njikam Njimonzie

Jan Sparbert

Johannes Baader

Andreas Duell

Siegwart Bogatscher

Stephen Schmitt

Ulrike Schloeder

Daniel Maier

An interposer substrate, a MEMS device and a corresponding manufacturing method. The interposer substrate is equipped with a front side and a rear side, a cavity starting from the rear side, which extends up to a first depth, a through-opening and a sunken area situated between the cavity and the through-opening, which is sunken from the rear side up to a second depth in relation to the rear side, the first depth being greater than the second depth.

Interposer substrate, MEMS device and corresponding manufacturing method

A scanning device includes a transmitter, a receiver, and a rotor that is configured to be mounted in a rotatable manner about an axis of rotation. The transmitter is configured to at least occasionally emit electromagnetic radiation, and the receiver is configured to sense at least part of the electromagnetic radiation reflected and/or scattered by an object. The transmitter and the receiver are arranged on the rotor in an at least partially axially overlapping manner based on the axis of rotation.

Scanning device

A micromechanical component includes a micromirror connected to a mounting support via at least one spring such that the micromirror is adjustable about at least one axis of rotation relative to the mounting support, where the micromirror includes a reflective surface developed at least partially on a first diaphragm surface of a mounted diaphragm of the micromirror, the diaphragm including a second diaphragm surface that faces away from the first diaphragm surface and that is mounted in air or vacuum.

Micromechanical component and method for producing a micromechanical component

A micromechanical component includes an adjustable part, a mounting, at least one bending actuator, and a permanent magnet. The part is positioned on the mounting so as to be adjustable relative to the mounting about a first rotation axis and about a second rotation axis inclined relative to the first axis. The actuator includes at least one movable subregion. Movement of the subregion results in a restoring force that moves the part about the first axis. The part is connected indirectly to the magnet to be adjustable about the second axis of rotation via a magnetic field built up by the magnet together with a yoke device of the component or an external yoke. A micromirror device includes the micromechanical component. A method for adjusting the part includes adjusting the part simultaneously about the first and the second axes.

Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another

A micromirror assembly is described as including a spring-mounted mirror and at least one stop unit, which is designed to restrict a movement of the mirror in the event of a movement of the mirror in a predefined direction out of its idle position. Furthermore, the invention relates to a projection device.

Micromirror arrangement and projection device

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Wuerzburg, Germany

Stefan Mark