Leybold Aktiengesellschaft

Leybold Optics Gmbh

Balzer Und Leybold Deutschland Holding Ag

Stefan Locher

Roland Gesche

Eckhard Wirth

Herbert Gries

Disclosed is an electron beam evaporator for installation in a vacuum apparatus which provides for variable positioning during or between applications of a coating. The apparatus has a carrier plate which is a flat hollow body, the top cover plate of which supports the evaporator. The hollow body is disposed over the bore in the tank such that it can be turned about the main axis of the bore. The component assemblies of the electron beam evaporator are vacuum-tight on the cover plate and the connecting lines are carried through the interior of the hollow body to the component assemblies.

Apparatus and method for electron beam evaporation

In a device for holding lenses for eye glasses to be coated (,&prime;, . . . ) with a substrate holder (,) consisting of cap-like sheet-metal blanks (,) forming a dish in the form of a spherical segment and having several drill-holes (,&prime;, . . . ), rotating on a vertical axis (R) in the vacuum chamber (,) above a coating source (Q), the coating source (Q) being mounted to the side of the axis of rotation (R) and the lenses (,&prime;, . . . ) being placed and held in the drill-holes (,&prime;, . . . ), the mean perpendicular (M) of the respective drill-hole longitudinal axis (A) intersects the axis of rotation (R) of the substrate holder (,) at a point (O) roughly halfway between the two locations which are the points of intersection (C,F) of the mean perpendiculars (M&prime;,M&Prime;) of two notional drill-holes of the same drill-hole pitch circle (T) with the axis of rotation (R), whose drill-hole longitudinal axes (A&prime;,A&Prime;) intersect the coating source (Q), the one notional drill-hole however having the largest and the other notional drill-hole having the shortest distance from the coating source (Q).

Device for holding lenses, especially for eye glasses to be coated in a vacuum coating or sputtering machine

A circuit for adjusting the impedance of a plasma section to a high-frequency generator wherein three capacitors are connected in series between the high-frequency generator and an electrode of the plasma section; located between the generator and the electrode are two parallel oscillatory circuits.

Circuit for adjusting the impedance of a plasma section to a

Planetary gear system including one set of gearwheels 11, in particular for devices for coating substrates 3, 3', . . . in a high-vacuum coating chamber where a drive shaft 9 supported and guided in a stationary bearing 1A is provided with a radially extending carrier plate 10 for planets and where the main axis of the stationary sun gear 8 coincides with the rotating axis of the drive shaft 9 and engages the set of gearwheels, wherein the bearing cage, which includes a top plate 27 and a bottom plate 28, via an axis 23 extending parallel to the rotating axis, engages an opening 16, the latter being provided in an area which is located radially inside the carrier plate 10 and wherein the drive shaft 26 of the set of gearwheels 11 is supported and guided in a slot 17 which is in area radially on the outside of the carrier plate 10 and emerges out of the carrier plate 10 parallel tot he rotating axis.

Planetary gear system with a set of gears, particularly for devices for

The invention concerns an on-off switch (1) for high-frequency currents. This switch (1) comprises a housing (2) made of an electrically non-conducting plastic and sealed at both its upper and its lower sides by electrically conducting contact parts (3,4). A metal bellows (14) is present in the housing (2) and is connected at one end to one of the contact parts, (4) and at its other end to a contact head (25). Using compressed air, the contact head (25) can be moved to make contact with the other contact part (3) or be removed away from it.

High frequency, large current, switch including a pressure-actuated

The invention relates to a circuit configuration for the automatic tuning of a matching network (2) disposed between an electrical energy source (1) and a load (3). Herein two measured signals (U.sub.E, U.sub.1) are received from which are formed the magnitudes of three signals (U.sub.E, U.sub.1, I.sub.E) from which, in turn, the control values x.sub.1, x.sub.2 are determined for the setting of the matching network (2).

Circuit configuration for the automatic tuning of a matching network

The invention relates to a cooling device for circuit configurations in which high electrical energies are converted and specifically for electrical matching circuits with which the impedance of a plasma path is matched to a high frequency generator. Herein one or several coils are provided with a water cooling system in such a way that the cooling water is completely separated from the electromagnetic fields through metallic material. These coils consist of two tubes slid one into the other, wherein the cooling water is fed and drawn through the internal tube and between the two tubes so that it is completely within the field-free region.

Cooling device for electrical circuit configurations

The invention concerns an electrical reversing switch, which is especially suited for switching of high-frequency electrodes. This switch has an over mounted pneumatic cylinder, which moves on pistons arranged on both sides, and thus produces electric contacts.

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Alzenau, Germany

Stefan Locher