Isra Vision Gmbh

Stefan Leute

Koichi Harada

Methods for optically inspecting a surface () of an object () and an inspection device () including are described. With the method a temporally periodic pattern () with different illumination patterns () is generated on the surface () via a illumination device () of the inspection device () during an image recording sequence (), and in the image recording sequence a number of images of the pattern () on the surface () are recorded via an image recording device () of the inspection device (), wherein generating one of the different illumination patterns () is synchronised, respectively, with the image recording of one of the images of the pattern (), the phase of the pattern () is determined from the succession of the recorded known illumination patterns () in at least one image point and defects () on the surface () are detected from deviations of the recorded illumination pattern () from the generated known illumination pattern ().

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Herten, Germany

Stefan Leute