Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno

Stefan Kuiper

William Edward Crowcombe

Hamed Sadeghian Marnani

Erwin John Van Zwet

Stefan Michael Bruno Bäumer

Nicolaas Jan Doelman

Jan Roelof Nijenhuis

Thomas Liebig

Willem Arjan Klop

Martin Paul Alfred Kooper

Thomas Paulus Cornelis Van Adrichem

An optical element exchange unit, has a rotatable wheel e.g. with different filters. The wheel has first soft magnetic teeth protruding from a soft magnetic part of the wheel at even angular offset along at least part of a ring around a rotation axis of the wheel. The optical element exchange unit has a stator comprising a first soft magnetic yoke, the first soft magnetic yoke having poles with a first group and second group of at least one second soft magnetic tooth respectively, the second soft magnetic teeth of the first and second group protruding from the poles of the first soft magnetic yoke towards the first soft magnetic teeth and a second soft magnetic yoke, the second soft magnetic yoke having poles with a third group and fourth group of at least one second soft magnetic tooth respectively, the second soft magnetic teeth of the third and fourth group protruding from the poles of the second soft magnetic yoke towards the first soft magnetic teeth. A permanent magnet is magnetically coupled between parts of the first and second soft magnetic yoke. The teeth of the first, second, third and fourth groups are positioned so that, when each tooth of the first group is aligned with its nearest first soft magnetic tooth, each second soft magnetic tooth of the second group is halfway the angular offset between its nearest first soft magnetic teeth, and the second soft magnetic teeth in the third and fourth group are less than half the angular offset in opposite directions from their nearest first soft magnetic teeth.

Optical element exchange unit

A deformable mirror device has a flexible layer with a front surface that forms a mirror surface or to which a mirror layer forming mirror surface is attached. The flexible layer consists homogeneously of a first material. Protrusions extend from the back surface of the flexible layer. The protrusions consist homogeneously of the first material or a material with substantially the same thermal expansion coefficient. A plurality actuators are coupled to the protrusions and via the protrusions to the flexible layer, to deform the flexible layer. The flexible layer and the protrusions may be part of an integral body of the first material, or bonded to the flexible layer. The distal end of each protrusion has a curved surface that at least partly has a spherical shape.

Controllably deformable mirror device

An electromagnetic actuator including a soft-ferromagnetic yoke is described. The electromagnetic actuator includes an at least substantially cylindrical circumferential wall covered at a first end with a base and at a second end with a top, the circumferential wall defining an axis in a direction from the base end to the top. An intermediate yoke section holds a permanent magnet fixed that leaves an inner space housing an axially movable core element being flexibly restrained with at least one resilient element. One of a base yoke section and/or a top yoke section houses an electromagnetic coil.

Electromagnetically controlled segmented mirror, electromagnetic actuator for use therein and method for manufacturing the same

A directable light beam handling device for use in optical communication contains is provided that contains a rotation mechanism with a rotatable ring of soft magnetic material encircling a path of the beam from a beam expander. A mirror or prism being coupled to the rotatable ring is rotated with the ring. The ring includes an array of soft magnetic ridges, forming elevations extending from a surface of the ring. At least three electromagnets are used to drive rotation of the ring around the beam axis. Each electromagnets comprises a soft magnetic yoke, having poles at a first and second end portion of the yoke. The pole at the first end portion faces said surface of the ring, the first end portion having ridges elevated from the yoke in the direction towards the ring, in parallel with the ridges of the ring.

Directable light beam handling device for optical communication

A device and method for pivotally positioning a moveable member, wherein a magnetically conductive base member is arranged opposite the magnetically conductive moveable member with a gap provided therebetween. A first magnet is arranged for providing a first magnetic flux through the base member and the moveable member such as to provide at least two first magnetic closed flux paths. A second electromagnet is arranged for providing a second magnetic flux through the base member and the moveable member such as to provide at least one second magnetic closed flux path. The second electromagnet is configured for changing, in one or more of the at least two first magnetic closed flux paths, a resulting magnetic flux provided by the first magnetic flux and the second magnetic flux such as to pivot the moveable member by means of the pivot member. The moveable member is pivotally suspended using a flexural pivot member.

Device and method for positioning a moveable member, and a steerable mirror unit including such device

The present invention relates to an optical coherence tomography method, comprising: providing a beam of imaging radiation from a radiation source of an optical coherence tomography apparatus; directing, using directing optics, the beam of imaging radiation towards a fundus of a human or animal eye; and receiving a reflected portion of the imaging radiation by the optical coherence tomography apparatus; wherein the method further comprises: providing, by a tracking camera, a tracking image of an image area covering at least a part of said fundus; analyzing the tracking image for detecting a displacement of the fundus; and adapting, at least dependent on the detected displacement, a direction of the beam of imaging radiation by actuating an optical correction unit of said direction optics; and in addition to said adapting of the direction of the beam of imaging radiation, adapting a location of the image area on said fundus imaged by the tracking camera at least dependent on the detected displacement.

Optical coherence tomography method, system and computer program product therefor

This document describes a method of determining an overlay error during manufacturing of a multilayer semiconductor device. Manufacturing of the semiconductor device comprises forming a stack of material layers comprising depositing of at least two subsequent patterned layers of semiconductor material, the patterned layers comprising a first patterned layer having a first marker element and a second patterned layer having a second marker element. The determining of the overlay error comprises determining relative positions of the first and second marker element in relation to each other, such as to determine the overlay error between the first patterned layer and the second patterned layer. In addition an imaging step is performed on at least one of said first and second patterned layer, for determining relative positions of the respective first or second marker element and a pattern feature of a device pattern comprised by said respective first and second patterned layer.

Method of determining an overlay error, manufacturing method and system for manufacturing of a multilayer semiconductor device, and semiconductor device manufactured thereby

A scanning probe microscopy system for mapping nanostructures on a surface of a sample, comprises a metrology frame, a sensor head including a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system comprises a clamp for clamping of the sample, which clamp is fixed to the metrology frame and arranged underneath the sensor head. The clamp is arranged for locally clamping of the sample in a clamping area underneath the probe tip, the clamping area being smaller than a size of the sample such as to clamp only a portion of the sample. Moreover, a metrology frame for use in scanning probe microscopy system as described includes a clamp for clamping of a sample, wherein the clamp is fixed to the metrology frame such as to be arranged underneath the sensor head.

Scanning probe microscopy system for mapping nanostructures on a surface of a sample and metrology frame therefore

A scanning probe microscopy system for mapping nanostructures on a surface of a sample is described. The nanostructures include at least one face having a slope with a slope angle that exceeds a threshold. The system includes a metrology frame, a sample support structure, a sensor head including a probe which includes a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the substrate surface. For sensing the nanostructures, the probe tip is arranged under a fixed offset angle with respect to the sensor head such as to be angled relative to the sample surface. The system further includes a sensor head carrier for receiving the sensor head, the sensor head carrier and the sensor head being provided with a mutually cooperating mounting structure for forming a kinematic mount having at least three contact points for detachable mounting of the sensor head on the sensor head carrier.

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's-Gravenhage, Netherlands

Stefan Kuiper