Leybold Aktiengesellschaft

Singulus Technologies Ag

Singulus Technologies Gmbh

Balzers Und Leybold Deutschland Holding Ag

Balzers Und Leybold Aktiengesellschaft

Stefan Kempf

Michael Reising

Jaroslav Zejda

Eggo Sichmann

Michael König

Friedrich Anderle

Bernhard Cord

Dan L Costescu

Emmerich Novak

Karl Schmitt

Holger Schramm

Thomas Merz

Mathias Hohlmayer

Andreas Amrhein

Uwe Horlitz

Uemit Seyhan

Georg Roth

Frank Hofmann

Benjamin Mandlmeier

Jens Eckstein

Peter Reustle

Jan-Christof Jacobi

Michael Mücke

ÜMit Seyhan

A treatment machine comprises a chamber for the treatment of one substrate or a plurality of substrates. A rotatably supported temperature-controlled shaft () defines a cylindrical, gas-tight hollow space. A heating arrangement () is provided for electrically heating at least a part of the shaft () arranged in the chamber. The heating arrangement () comprises an accommodation mandrel () for accommodating at least one electrical heating element (), said accommodation mandrel () being arranged in a non-rotating manner and extending into the hollow space of the shaft (). An outer surface of the accommodation mandrel () is spaced apart from an inner surface of the shaft () by a gap.

Treatment machine, drive unit for a treatment machine and use of the treatment machine

A device for treating substrates by a treating liquid has at least one rotatably supported support roller which a substrate to be treated rests on during operation. The support roller has a hollow cylinder having a porous rigid material which the substrate to be treated rests on during operation. The device is configured to deliver, during operation, treating liquid via the interior of the hollow cylinder of the at least one support roller through the porous rigid material to the external surface of the hollow cylinder in order to treat at least one surface of the substrate by the treating liquid. The device is configured to treat several substrates in the form of plate-shaped separate wafers arranged one behind the other and/or next to one another in the device, by the treating liquid and to transport the substrates in a transport plane during the treatment.

Device and method for treating substrates using a support roller having a porous material

A continuous system for transmitting accelerating forces and decelerating forces by interlocking, consisting of at least one carrier system having at least two connecting elements, a plurality of transport systems arranged one behind the other, wherein each transport system has a cam drum or cylindrical cam having a helical groove and the connecting elements of the carrier system are suitable for interlockingly engaging with the groove of the cam drum, and at least one motor, which drives the cam drums.

Continuous system

The invention describes a method and a device for introducing and removing substrates. Substrates () are transported into a lock () by a transport element (). A collection container () is located in the lock below the substrates () for collecting possible substrate fragments (). The substrates () are removed together with the collection container () and the lock cover () once the lock () has been flooded. The lock cover () and the collection container () form an almost closed box around the substrates (). After the substrates () have been replaced and the collection container () has been emptied, the new substrates () are introduced together with the collection container. All the steps are carried out in the machine cycle to ensure an effective production process.

Method and device for introducing and removing substrates

A device for transporting a substrate () into a working area () which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport element () transports a substrate () in the plane (XY) to a defined working area () of a chamber (). The transport element () has a deflectable sealing frame () which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame () has two opposing sealing surfaces () in the Z-direction. By pressing a closure element () against a first sealing surface () and thus pressing the second sealing surface () against a chamber wall (), the space of the working area () of the chamber () can be sealed.

Transport device having a deflectable sealing frame

A device and a method for separately transporting substances are provided. The device and method according to the invention can especially be used in connection with an unit for producing DVDs. Preferably, the device according to the invention has for each substrate an input station, a processing station and an output station, which stations are arranged on the circular arc at given distances &agr;. Furthermore, grippers are provided, which are arranged on said circular arc at given distances &agr; and can be simultaneously rotated around an axis through the center of said circle through an angle &bgr;. Each gripper transports one substrate to the processing and output stations in a rotational movement. It is the advantage of the invention that the mixing-up of substrates is avoided.

Device and method for transporting separate substrates

Apparatus 1 for gripping, holding and/or transporting substrates 2, components of which are an entry station 3 and several processing station 4 to 9 arranged in series or in a circle for receiving the substrate 2, to which the substrate 2 is passed on by means of a transporting device 1 disposed on gripper arms 13 and having gripper elements 24, or a turntable 12, and subsequently is deposited in one or several deposit stations 14, wherein several gripper arms 13 can be shifted in the horizontal and/or vertical direction by means of the turntable 12. Some of the gripper elements 24 can be shifted together in the horizontal or vertical direction by means of the turntable 12 and at least one gripper arm 13' can be shifted in at least one of the movement directions independently of the remaining gripper arms 13.

Device for gripping, holdings and/or transporting substrates

Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5) disposed in a vacuum chamber (4, 4', 4'). The apparatus includes at least one displaceably disposed gripper (75), which can be displaced by a mechanical and/or electro-magnetically or magnetically operating positioning device (130) between a substrate gripping position and a substrate release position, and a centering device (157, 157', 161) for centering a substrate relative to the substrate support in conjunction with transport of the substrate by the apparatus to the substrate support.

Device for transporting substrates

An apparatus for transporting substrates between a first device and at least one second device for gripping and holding substrates with a substrate holder disposed in a vacuum chamber. The first device for gripping and holding substrates is equipped with one or more movable grippers which are movable by a mechanical and/or electromechanical or magnetically operating displacement device into a position that holds or releases the substrate, and the second device for gripping and holding substrates is equipped with one or more movable grippers which are movable counter to the action of a control pressure or of a spring, into a first position and, via the action of a diaphragm that can be subjected to a pneumatic pressure and/or a vacuum pressure and an adjusting part cooperating with the diaphragm, into a second position, wherein in the one position the substrate is held and in the second position the substrate is released for further transport, and in the position of the two devices for transfer of the substrate two substrate receiving parts can be aligned and fixed coaxially with one another.

Substrate transporting apparatus

A device 1 for gripping and holding substrates 2 with one or several substrate holders 5 arranged in a vacuum chamber 4, 4', 4' and one or several displaceably arranged grippers 3, which can be displaced into a first position through the action of an operating pressure or against the action of a spring 6, and into a second position through the action of a diaphragm 7, which can be exposed to a pneumatic pressure P.sub.a and/or to an operating element 8 cooperating with it, wherein the substrate 2 is held when the diaphragm is in a first position and the substrate 2 is released for being further transported when the diaphragm is in a second position. The diaphragm 7 is integrated into the vacuum chamber in such a way that in an operating position it is exposed to atmospheric pressure P.sub.a on the one side 9 and on the other side 10 to vacuum pressure P.sub.v, and in a second position is exposed to vacuum pressure P.sub.v on both sides.

Device for gripping and holding substrates

A plurality of finger-like grippers (12, 13, 14) pivotably supported in a housing (4, 5), and a plunger or piston (7) with a head part (8a) acting on the grippers (12, 13, 4), the piston being supported in such a way that it is free to slide in the housing (4). The grippers are held and guided in openings (17, 18) in the top part (5) of the housing (4) and can pivot about axes transverse to the longitudinal axis (L) of the housing (4, 5), where the pivot axes (a, b, c) of all the grippers are in the same plane (e) and together form a regular polygon surrounding the longitudinal axis (L). The ends of the grippers (12, 13, 14) facing the piston (7) are surrounded as a group by a ring of elastic material or by a garter spring (15), which pulls them toward stop surfaces (4b), which limit the pivoting movement.

Apparatus for gripping a flat substrate

A device including a sputtering cathode 2 and masks for masking or covering portions of a surface of a substrates 27, having a center mask guide element 56 on which a center mask 26, which covers the substrate 27, is disposed and works together with an outer mask 4 in such a way that only the uncovered part of the substrate 27 is coated during the coating process. The inner and/or the outer masks 4, 26 can be adjusted independently of each other along a longitudinal center axis 58 of the device.

Device for masking or covering substrates

A pivot arm (3) is rotatable about an axis for delivering and removing a flat workpiece (24) into and out of the area of the lock (19) of an evacuable coating chamber (26). The pivot arm (3) is provided at its distal end with the retaining bolt (12) which is perpendicular to the plane (20) of the lock opening (19) and attached to a central part of a flexible diaphragm. The diaphragm is substantially parallel to the sealing surface of a workpiece carrier (16) and is fixed around its outer radial edge to the workpiece carrier so that the workpiece carrier (16) is able to tilt slightly during its vertical closing motion.

Apparatus for transfer of workpieces into and out of a coating chamber

Several finger-like grippers (4) are held and guided in openings or holes (21) in the head part (6) of a housing (20) so they can pivot about axes which are in a common plane transverse to the longitudinal axis (L) of the housing (20). Permanent magnets (11, 12) fixed to the inner ends of the grippers (4) cooperate with an electromagnet (13) provided in the housing (20) above the magnets (11, 12), the magnetic field axis of the electromagnet coinciding with the longitudinal axis (L) of the housing (20). The electromagnet moves the inner ends of the grippers (11, 12) back and forth between two stops (16, 17) depending on the polarity of the electromagnet (13).

In an apparatus for the transfer of substrates (9) from an initial station (3) through several process stations (4 to 8) and back to this initial station (3), manipulators (10 to 14) having pivoting gripper arms (15 to 19) and carousel transfer systems (20,21) for the transfer of the substrates (9) are provided. One of the carousels (20) provided with substrate holders (22) cooperates both with a two-armed first manipulator (11) and with a two-armed second manipulator (10). The second manipulator (10) lifts several substrates (9) simultaneously from the first carousel (20) in one period of time and feeds them to the corresponding second process station (5) which is configured for the simultaneous processing of several substrates. The second manipulator (11), in the same period of time, lifts one substrate (9) at a time from the first carousel (20) in several swings of its two gripper arms (16,16') and feeds them to the first process station (4) for the processing of one substrate at a time and carries them back from this process station (4) onto the first carousel (20). Two injection molding machines can be associated with the first carousel (20) and can feed the substrates directly through an additional manipulator.

Growing community of inventors

Alzenau, Germany

Stefan Kempf