Deutsche Aerospace Ag

Stefan Heinemann

Helmut Seidel

Peter Peuser

Nikolaus Peter Schmitt

Axel Mehnert

Walter Kroy

The invention relates to a method for producing a microsystem and from it forming a microsystem laser, which preferably has a vertical structural element by contacting of wafer plates, which carry different functional elements of a system, so that this system on the one hand thus includes heterogeneous functions such as actuators, optics, sensors, cooling systems, micromechanics and electronics, and on the other hand, the wafer carrying these functions permits a relatively homogeneous processing of quite similar functions integrated each on one wafer, so that the complexity of the system is created for the first time for the vertical arrangement of these functions.

Method for producing a microsystem and forming a microsystem laser

The invention provides a laser system with one or several micro-mechnically produced, actively controlled laser mirrors which are provided with an actuation device, so that the rapid manipulation of small laser mirrors is assured. The mirrors are designed so that they permit an economical production in large numbers.

Growing community of inventors

Munich, Germany

Stefan Heinemann