Infineon Technologies Ag

Stefan Geißler

Stefan Barzen

Wolfgang Klein

Marc Fueldner

Ulrich Krumbein

Matthias Friedrich Herrmann

Juergen Wagner

Giordano Tosolini

Konstantin Tkachuk

Evangelos Angelopoulos

In an embodiment, a method for forming a microfabricated structure includes depositing a first membrane on a substrate, depositing a first isolation layer on the first membrane, depositing a stator layer on the first isolation layer, forming a perforated stator from the stator layer, wherein the first isolation layer is disposed on a first surface of the perforated stator, depositing a second isolation layer on a second surface of the perforated stator and depositing a second membrane on the second isolation layer, including depositing a pillar coupled between the first membrane and the second membrane, wherein the first isolation layer includes a first glass layer having a low etch rate, and a second glass layer having a high etch rate embedded in the first glass layer.

Membrane support for dual backplate transducers

Growing community of inventors

Wuppertal, Germany

Stefan Geißler