International Business Machines Corporation

Swisslitho Ag

Stefan Fringes

Armin W Knoll

Michael Skaug

Christian Michael Schwemmer

Colin Rawlings

Urs T Duerig

Felix Holzner

Embodiments of the invention include a microfluidic device, which comprises a substrate with a channel defined therein, on an upper surface of the substrate, wherein a bottom wall of the channel comprises several contiguous steps having an asymmetric profile along a main direction of the channel, so as to form a ratchet topography. The device further comprises a lid, opposite to and at a distance from the upper surface of the substrate, so as to face the bottom wall of the channel. The bottom wall and the lid are designed to allow like sign charges to accumulate thereat, in presence of a polar liquid confined in the channel between the bottom wall and the lid, so as to allow displacement of nanoscale particles in the polar liquid, along said main direction of the channel, under application of an alternating force to said nanoscale particles, in operation of the device.

Microfluidic ratchets for displacing particles

The present invention provides a method for multiscale patterning of a sample. The method includes: placing the sample in an apparatus having both thermo-optical lithography capability and thermal scanning probe lithography capability; and patterning two patterns onto the sample, respectively by: thermo-optical lithography, wherein light is emitted from a light source onto the sample to heat the latter and thereby write a first pattern that is the largest of the two patterns; and thermal scanning probe lithography, wherein the sample and a heated probe tip are brought in contact for writing a second pattern that has substantially smaller critical dimensions than the first pattern. There is also provided an apparatus for multiscale patterning of a sample.

Multiscale patterning of a sample with apparatus having both thermo-optical lithography capability and thermal scanning probe lithography capability

Growing community of inventors

Schwabhausen, Germany

Stefan Fringes