Carl-zeiss-smt Ag

Stefan Dornheim

Markus Weiss

Andreas Seifert

Andreas Heisler

Wolfgang Singer

Hubert Holderer

Frank Melzer

Berndt Warm

Heinz Mann

Jurgen Faltus

A faceted mirror apparatus includes a support plate having a plurality of stepped reception bores into which are fitted the base portions of respective ones of a plurality of mirror facets having mirrored surfaces. An outer surface of each of the facets bears on an inner wall to provide a stable alignment of the optical axes of the mirrored surfaces such that the apparatus generates a beam of rays from impinging rays.

Faceted mirror apparatus

A facet mirror () is provided with a number of mirror facets (), in which the mirror facets () respectively have a spherical or conical facet body () with a reflecting surface (). The side of the facet body () averted from the reflecting surface () is mounted in a bearing device ().

Facet mirror having a number of mirror facets

In a method for the production of a facetted mirrorhaving a plurality of mirror facetsand', which have mirror surfacesand are fitted into reception bores&#x2032; of a support platethe mirror facets&#x2032; are made in a first method step. At least one of the mirror facets is fitted into the associated reception bore of the support plate in a second method step, after which the ACTUAL position of the optical axis of at least one mirror surface of an associated mirror facet&#x2032; fitted into the support plate is respectively determined in a third step and compared with a SET position of a predetermined optical axis. Knowing the measured values determined for the at least one mirror facet&#x2032; in the third method step, reprocessing of the mirror facet and/or of the reception bore is subsequently carried out in a further method step if there is an angular deviation between the ACTUAL position and the SET position.

Method for the production of a facetted mirror

Growing community of inventors

Heidenheim, Germany

Stefan Dornheim