Centre National De La Recherche Scientifique

Université De Limoges

Hager Controls

Stanis Courreges

Pierre Blondy

Arnaud Pothier

Jean-Christophe Orlianges

Thomas Wohlfahrt

Daniel Kieffer

Jean-Noël Paillard

Philippe Fricker

The present invention relates to an microelectromechanical system () comprising: a base () comprising a substrate () and a substrate electrode (); a moveable beam (); a voltage generator () able to generate a potential difference between the beam () and the substrate electrode (); and at least one mechanical stop () connected to the beam and designed to make contact with the base () when a potential difference is applied between the beam () and the substrate electrode (), thereby defining an air-filled cavity () between the beam () and the substrate electrode (), characterized in that it furthermore comprises an electrical-charge blocking element () placed on the substrate (), said element facing the at least one mechanical stop () and being electrically connected to the beam ().

Electromechanical microsystems with air gaps

Growing community of inventors

Imbsheim, France

Stanis Courreges