Yield Dynamics, Inc.

Stacy K Firth

W Jarrett Campbell

A system and method for estimating errors within a semiconductor fabrication process. The system identifies an optimal number of error components based upon relevant context items. The system further estimates the error within the fabrication process and attributes portions of the error to each of the identified error components based upon feedback data received from the manufacturing process.

System and method for estimating error in a manufacturing process

A system and method for controlling critical dimension in a semiconductor manufacturing process. The system controls critical dimension by altering focus and exposure settings, based on a single measured attribute (i.e., critical dimension) and on a process model equation. The system further systematically varies focus and exposure settings (e.g., by introducing variable deviation values), in order to provide unique and stable solutions for parameters within the process model equation.

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Austin, TX, United States of America

Stacy K Firth