Varian Semiconductor Equipment Associates, Inc.

Stacia L Theriault

Scott C Holden

Fletcher Ian Potter

Daniel L Goodwin

Omar S Kiyani

Sheri A Roub

A device for transferring articles between an atmospheric pressure environment and a vacuum environment includes a transfer housing having an atmospheric transfer port, a pumping port, a vacuum transfer port, and a venting port disposed in a circumferentially-spaced relationship. The vacuum transfer port is in communication with the vacuum environment and the atmospheric transfer port is in communication with the atmospheric pressure environment. The device can include a carrier disc rotatably disposed within the transfer housing, the carrier disc having a pocket formed in a sidewall thereof for holding an article. The device may further include an air bearing associated with the transfer housing and configured to expel gas to maintain a gap between the transfer housing and the carrier disc.

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Amesbury, MA, United States of America

Stacia L Theriault