Onera (office National D'etudes Et De Recherches Aerospatiales)

Centre National De La Recherche Scientifique

Onera

Stéphane Landais

Pierre J Josso

Olivier Dessornes

Stéphan Megtert

Roger Valle

Fayçal Bouamrane

Thomas Bouvet

The invention relates to a process for fabricating a high-precision object made of at least one inorganic material, comprising the following steps: using a high-resolution photolithography process, employing X-rays or UV rays depending on the desired degree of precision, in a chosen direction Z, to form a negative mold, which does not deform at the microscale during the steps of the process, in a material able to withstand a step for forming the object by dry deposition and capable of either being removed without altering the object fabricated or being separated from said object; choosing, independently of the normal redox potential of its constituent elements, at least one inorganic material from the set of materials that can be deposited by dry deposition and that allow the object to be fabricated to meet its thermomechanical and environmental specifications; and forming, by means of the non-deformable negative mold, the object to be fabricated by dry deposition of said at least one inorganic material, thereby allowing an object to be fabricated with better than microscale precision, especially with respect to the angle between the walls generated by the dry deposition and said direction Z. The invention is preferably applied to the fabrication of high-precision micromechanical objects, in particular in the aeronautical and clock-/watch-making fields.

Process for fabricating high-precision objects by high-resolution lithography and dry deposition and objects thus obtained

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Chaville, France

Stéphane Landais