Sigray, Inc.

Carl Zeiss X-ray Microscopy, Inc.

Xradia, Inc.

Srivatsan Seshadri

Wenbing Yun

Janos Kirz

Sylvia Jia Yun Lewis

Thomas Anthony Case

Michael Feser

Susan Candell

Ruimin Qiao

Alan Francis Lyon

Benjamin Donald Stripe

David Vine

Paul McGuinness

Yuxin Wang

Kenneth W Nill

Frederick William Duewer

Andrei V Tkachuk

Naomi Kotwal

An apparatus is configured to receive x-rays propagating from an x-ray source. The apparatus includes first and second x-ray diffractors, the second x-ray diffractor downstream from the first x-ray diffractor and first and second x-ray detectors. The first x-ray diffractor is configured to receive the x-rays, to diffract a first spectral band of the x-rays to the first x-ray detector, and to transmit at least 2% of the received x-rays to the second x-ray diffractor. The second x-ray diffractor is configured to receive the transmitted x-rays from the first x-ray diffractor and to diffract a second spectral band of the x-rays to the second x-ray detector. The first x-ray detector is configured to measure a first spectrum of the first spectral band of the x-rays and the second x-ray detector is configured to measure a second spectrum of the second spectral band of the x-rays.

X-ray sequential array wavelength dispersive spectrometer

A fluorescence mode x-ray absorption spectroscopy apparatus includes an electron bombardment source of x-rays, a crystal analyzer, the source and the crystal analyzer defining a Rowland circle having a Rowland circle radius (R), a detector, and at least one stage configured to position a sample such that at least a portion of the sample is between the crystal analyzer and the detector.

System and method for x-ray absorption spectroscopy using a crystal analyzer and a plurality of detector elements

An apparatus includes a crystal analyzer positioned relative to an x-ray source on a Rowland circle. The crystal analyzer includes crystal planes curved along at least one direction and configured to receive x-rays from the x-ray source and to disperse the received x-rays according to Bragg's law. The apparatus further includes a spatially resolving detector that includes a plurality of x-ray detection elements having a tunable first x-ray energy and/or a tunable second x-ray energy. The plurality of x-ray detection elements are configured to measure received dispersed x-rays having x-ray energies below the first x-ray energy while suppressing measurements above the first x-ray energy and/or to measure the received dispersed x-rays having x-ray energies above the second x-ray energy while suppressing measurements below the second x-ray energy.

An x-ray spectrometer system includes an x-ray source, an x-ray optical system, a mount, and an x-ray spectrometer. The x-ray optical system is configured to receive, focus, and spectrally filter x-rays from the x-ray source to form an x-ray beam having a spectrum that is attenuated in an energy range above a predetermined energy and having a focus at a predetermined focal plane.

X-ray spectrometer system

Systems and methods for x-ray emission spectroscopy are provided in which at least one x-ray analyzer is curved and receives and diffracts fluorescence x-rays emitted from a sample, and at least one spatially-resolving x-ray detector receives the diffracted x-rays. The at least one x-ray analyzer and the at least one spatially-resolving x-ray detector are positioned on the Rowland circle. In some configurations, the fluorescence x-rays are emitted from the same surface of the sample that is irradiated by the x-rays from an x-ray source and the system has an off-Rowland circle geometry. In some other configurations, an x-ray optical train receives the fluorescence x-rays emitted from a sample impinged by electrons within an electron microscope and focuses at least some of the received fluorescence x-rays to a focal spot.

X-ray emission spectrometer system

A method for performing x-ray absorption spectroscopy and an x-ray absorption spectrometer system to be used with a compact laboratory x-ray source to measure x-ray absorption of the element of interest in an object with both high spatial and high spectral resolution. The spectrometer system comprises a compact high brightness laboratory x-ray source, an optical train to focus the x-rays through an object to be examined, and a spectrometer comprising a single crystal analyzer (and, in some embodiments, also a mosaic crystal) to disperse the transmitted beam onto a spatially resolving x-ray detector. The high brightness/high flux x-ray source may have a take-off angle between 0 and 105 mrad. and be coupled to an optical train that collects and focuses the high flux x-rays to spots less than 500 micrometers, leading to high flux density. The coatings of the optical train may also act as a 'low-pass' filter, allowing a predetermined bandwidth of x-rays to be observed at one time while excluding the higher harmonics.

Method of performing X-ray spectroscopy and X-ray absorption spectrometer system

This disclosure presents systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro- or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using an arrayed x-ray source or a set of Talbot interference fringes.

Method and apparatus for x-ray microscopy

A multi energy, such as dual-energy ('DE'), x-ray imaging system data acquisition and image reconstruction system and method enables optimizing the image contrast of a sample. Using the DE x-ray imaging system and its associated user interface applications, an operator performs a low energy ('LE') and high energy (&#x201c;HE&#x201d;) x-ray scan of the same volume of interest of the sample. The system creates a low-energy reconstructed tomographic volume data set from the set of low-energy projections and a high-energy tomographic volume data set from the set of high-energy projections. This enables the operator to control the image contrast of selected slices, and apply the information associated with optimizing the contrast of the selected slice to all slices in the low-energy and high-energy tomographic data sets. This creates a combined volume data set from the LE and HE volume data sets with optimized image contrast throughout.

Multi energy X-ray microscope data acquisition and image reconstruction system and method

Systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using a arrayed x-ray source and a set of Talbot interference fringes.

Talbot X-ray microscope

An x-ray transmission spectrometer system to be used with a compact x-ray source to measure x-ray absorption with both high spatial and high spectral resolution. The spectrometer system comprises a compact high brightness x-ray source, an optical system with a low pass spectral filter property to focus the x-rays through an object to be examined, and a spectrometer comprising a crystal analyzer (and, in some embodiments, a mosaic crystal) to disperse the transmitted beam, and in some instances an array detector. The high brightness/high flux x-ray source may have a take-off angle between 0 and 15 degrees, and be coupled to an optical system that collects and focuses the high flux x-rays to micron-scale spots, leading to high flux density. The x-ray optical system may also act as a 'low-pass' filter, allowing a predetermined bandwidth of x-rays to be observed at one time while excluding the higher harmonics.

X-ray transmission spectrometer system

An x-ray imaging system data acquisition and image reconstruction system and method are disclosed which enable optimizing the image parameters based on multiple tomographic volumes of the sample that have been captured using an x-ray microscopy system. This enables the operator to control the image contrast, for example, of selected slices, and apply the information associated with optimizing the contrast of the selected slice to all slices in two or more tomographic volume data sets. This creates a combined volume with optimized image contrast throughout. Also, the system enables navigation within the volumes through functional annotation, improvements in volume registration and improvements in noise suppression both within the volumes and within slice histograms of the sample.

A correlative evaluation of a sample () using a combined x-ray computed tomography (CT) and x-ray fluorescence (XRF) system and the method for analyzing a sample () using x-ray CT and XRF is disclosed. The CT/XRF system () includes an x-ray CT subsystem () for acquisition of volume information and a confocal XRF subsystem () for characterization of elemental composition information. Geometrical calibration is carried out between the XRF subsystem () and the X-ray CT subsystem () such that a region of interest defined during X-ray CT acquisition can be retrieved by the XRF subsystem () for a subsequent XRF acquisition. The system () combines the sub-micrometer spatial resolution 3-D imaging capability of x-ray CT with the elemental composition analysis of confocal XRF to provide 3-D elemental composition analysis of a sample () with ppm level sensitivity. This is applicable to many scientific research and industrial applications, a prime example of which is the elemental identification of precious metal grains in crushed and ground ores and floatation tailings in the mining industry.

Combined confocal X-ray fluorescence and X-ray computerised tomographic system and method

A correlative evaluation of a sample using an x-ray computed tomography (CT) x-ray fluorescence (XRF) system and the method for analyzing a sample using x-ray CT and XRF is disclosed. The CT/XRF system includes an x-ray CT subsystem for acquisition of volume information and a confocal XRF subsystem for acquisition of elemental composition information. The CT/XRF system also includes a controller for managing the acquisitions by the x-ray CT subsystem and confocal XRF subsystem. Combining sub-micrometer spatial resolution 3-D imaging with elemental composition analysis in 3-D with ppm level sensitivity is important to elemental identification of precious metal grains in crushed and ground ores and floatation tailings in the mining industry.

Confocal XRF-CT system for mining analysis

CD-GISAXS achieves reduced measurement times by increasing throughput using longer wavelength radiation (&#x2dc;12&#xd7;, for example) such as x-rays in reflective geometry to increase both the collimation acceptance angle of the incident beams and the scattering signal strength, resulting in a substantial combined throughput gain. This wavelength selection and geometry can result in a dramatic reduction in measurement time. Furthermore, the capabilities of the CD-GISAXS can be extended to meet many of the metrology needs of future generations of semiconductor manufacturing and nanostructure characterization, for example.

Growing community of inventors

Pleasanton, CA, United States of America

Srivatsan Seshadri