Lpe S.p.a.

Srinivas Yarlagadda

Franco Preti

Natale Speciale

Mario Preti

The present invention relates to a reaction chamber of an epitaxial reactor that essentially consists of a quartz piece; the quartz piece comprises a quartz piece portion () having an internal cavity () defined by walls (A,B,C,D); the cavity () comprises a reaction and deposition zone () of the epitaxial reactor; the zone () is adapted to house a susceptor () to be heated therein; the reaction chamber also comprises a quartz component () arranged close to said walls (A,B,C,D) in such a manner as to form a counterwall and to be a wall of said zone ().

Reaction chamber of an epitaxial reactor and reactor that uses said chamber

A susceptor () for epitaxial growth reactors comprises a body () having a lower base (), an upper top () and some substantially flat side faces (); the side faces are adapted to receive, in predetermined areas (), substrates on which the epitaxial growth develops; body () is provided with edge side regions () defined by couples of adjacent side faces (); along edge side regions () in the upper part of body () there are provided first ribs () adapted to control the flow of reaction gases along side faces (); along edge side regions () in the lower part of body () there are provided second ribs () adapted to control the flow of reaction gases along side faces ().

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Baranzate, Italy

Srinivas Yarlagadda