Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno

Sri Ram Shankar Rajadurai

Hamed Sadeghian Marnani

Paul Louis Maria Joseph Van Neer

Maarten Hubertus Van Es

Daniele Piras

Marcus Johannes Van Der Lans

Kodai Hatakeyama

The present document relates to a heterodyne scanning probe microscopy (SPM) method for subsurface imaging, and includes: applying an acoustic input signal to a sample and sensing an acoustic output signal using a probe. The acoustic input signal comprises a plurality of signal components at unique frequencies, including a carrier frequency and at least two excitation frequencies. The carrier frequency and the excitation frequencies form a group of frequencies, which are distributed with an equal difference frequency between each two subsequent frequencies of the group. The difference frequency is below a sensitivity threshold frequency of the cantilever for enabling sensing of the acoustic output signal. The document also describes an SPM system.

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Delft, Netherlands

Sri Ram Shankar Rajadurai