Motorola Corporation

Spencer A Lane

Krishna D Jonnalagadda

Manes Eliacin

A meso-scale MEMS device having a movable member ( ) is formed using standard printed wiring board and high density interconnect technologies and practices. In one embodiment, sacrificial material disposed about the movable member ( ) is removed through openings ( ) as formed through a cover ( ) to form a cavity ( ) that retains and limits the freedom of movement of the movable member ( ). The movable member can support a reflective surface ( ) to thereby provide a mechanism that will support a projection display and/or image scanner (such as a bar code scanner).

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Irvine, CA, United States of America

Spencer A Lane