Taiwan Semiconductor Manufacturing Comp. Ltd.

Span Lu

Kuang-Huan Hsu

Chih-Wei Hsu

Chih-Wei Chen

Ren-Chyi You

Shui-Tien Lin

Chen-Yung Lin

Liang-Kai Huang

Provided are a system and method for preventing contamination in a semiconductor manufacturing environment. The method includes comparing one or more attributes associated with a product, such as a substrate, with one or more attributes associated with an operation. If the comparison indicates that the product is not compatible with the operation, then the operation is suspended with respect to the product. If the comparison indicates that the product is compatible with the operation, then the operation is performed on the product.

System and method for process contamination prevention for semiconductor manufacturing

An algorithm can be performed to control the dispatch of products in a fabrication or manufacturing facility. The queue time constraint tolerances and tool throughput are initialized for each product. Next the multiple processing demand time can be calculated for each product. The aggregating queue time constraint can then be calculated for each product. If the multiple processing demand time is less than the aggregating queue time constraint for each queue time limit tool, then any lot can be selected to be processed. Otherwise, the product at the given tool should be further processed.

Method for controlling queue time constraints in a fabrication facility

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Hsin-Chu, Taiwan

Span Lu