Ngk Insulators, Inc.

Sozaburo Hotta

Naohiro Shimizu

Yuichiro Imanishi

Tatsuya Terazawa

Yuji Watanabe

Wataru Shionoya

Yuuichirou Imanishi

A first electrode, a second electrode and a third electrode are provided in a middle of a passage. The second electrode is provided on an upstream side of the first electrode, and the third electrode is provided on a downstream side of the first electrode. A connecting line connects the first electrode to a first pole of a pulsed power supply, and connects the second electrode and the third electrode to a second pole of the pulsed power supply. The first electrode crosses a first gas passing surface and occupies a part of the first gas passing surface. The second electrode and the third electrode cross a second gas passing surface and a third gas passing surface and occupy a part of the second gas passing surface and the third gas passing surface respectively.

Plasma treating apparatus

A DC source generates a DC voltage between a positive electrode and a negative electrode. An inductive element and a parallel-connected switch-circuits unit are provided in a conductive path extending from the positive electrode to the negative electrode. The parallel-connected switch-circuits unit includes a plurality of switch circuits connected in parallel with one another. The switch circuit opens and closes the conductive path in accordance with a drive signal inputted from a drive circuit. The drive signal causes the plurality of switch circuits to successively perform an ON operation in which the conductive path is closed and then opened. A pulse voltage generation period in which a pulse voltage occurs in the inductive element continuously follows an ON period which is a duration from when the conductive path is closed to when the conductive path is opened.

Pulse generation circuit

A gas reforming device including: a flow passage forming body flow passage through which process gas flows; a cathode provided on a cross section of the flow passage; an anode provided apart from the cathode, and including a bar-like portion; and a pulse power supply that applies a pulse voltage between the cathode and the anode. The cathode includes: an opening array body that has at least a surface thereof made of an insulator, and has a planar structure in which openings through which the process gas passes are arrayed; and a grounding electrode provided on a peripheral portion of the flow passage. A tip end of the bar-like portion of the anode is located in an inside of the flow passage of the process gas, and is spaced apart from the opening array body in a direction parallel to a direction where the process gas flows.

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Nagoya, Japan

Sozaburo Hotta