Horiba Stec, Co., Ltd.

Sotaro Kishida

Takehisa Hataita

Akira Kuwahara

Junya Nakai

Masakazu Minami

Yuhei Sakaguchi

Takeshi Akamatsu

Hidetaka Yada

Motonobu Takahashi

Ryota Nakayama

Provided are a gas cell into which a gas is introduced, a temperature control block configured to control a temperature of the gas cell, and a pressure sensor configured to measure a pressure inside the gas cell. The pressure sensor is built into the temperature control block and/or the gas cell.

Gas analysis apparatus and gas analysis method

In a vacuum gauge that controls a temperature of a sensor section to a high temperature, a circuit board can be sufficiently cooled without applying air to the vacuum gauge from outside. The vacuum gauge includes a sensor section that communicates with a measurement space via a connection port and outputs an output signal according to a pressure in the measurement space, a heater provided around the sensor section to heat the sensor section, a circuit board arranged on a side opposite to the connection port with respect to the sensor section, a first inner case that accommodates the sensor section and the heater, a second inner case that accommodates the circuit board, and an outer case that surrounds the first inner case and the second inner case and forms a flow path, through which outside air flows, together with the first inner case and the second inner case.

Vacuum gauge

The pressure sensor comprises the diaphragm, an electrode body, a housing, an inlet pipe, and a thermal buffer member. The diaphragm includes a pressure receiving surface configured to receive a pressure of a measured target fluid. The electrode body includes an electrode surface facing a rear surface of the pressure receiving surface with a gap interposed therebetween. The housing supports the diaphragm so as to form a measuring chamber by surrounding the pressure receiving surface. The inlet pipe is coupled to the housing and configured to guide the measured target fluid into the measuring chamber. The thermal buffer member is disposed on the inlet pipe and has a predetermined heat capacity. Accordingly, the diaphragm is unlikely to bend due to a rapid temperature change in a fluid guiding pipe disposed a fluid line.

Pressure sensor with reduced deviation of temperature distribution

Provided is a capacitive pressure sensor that prevents the position of an electrode face in the direction parallel to a diaphragm from deviating from the position of the diaphragm, and accurately measures pressure. The capacitive pressure sensor includes: the diaphragm that deforms under pressure; an electrode member having the electrode face opposed to the diaphragm with a gap between the diaphragm and the electrode face; a body having one end to which the diaphragm is joined, and accommodating at least a portion of the electrode member; an insulating positioning member that is provided in the body and positions at least the portion of the electrode member in the body; and a pressing mechanism that holds and presses the insulating positioning member or the electrode member in the direction parallel to the diaphragm.

Capacitive pressure sensor with reduced sensitivity to temperature change

The present invention includes a detecting capacitor of which the capacitance is changed depending on pressure; a fixed capacitor having reference capacitance; an initial voltage application part that applies an initial voltage having a predetermined frequency to the detecting capacitor and the fixed capacitor; a first operational amplifier that outputs an output voltage based on a partial voltage applied to at least the detecting capacitor; a reference voltage generation part that generates a reference voltage that serves as a reference for a change in the output voltage of the first operational amplifier and has the same frequency as that of the initial voltage; a second operational amplifier that outputs an output voltage based on the difference between the output voltage of the first operational amplifier and the reference voltage; and a pressure operation part that operates a pressure from the amplitude of the output voltage of the second operational amplifier.

Capacitive sensor

Provided is a capacitive pressure sensor that prevents not only a change in temperature but also electromagnetic noise in the air from affecting the measurement value of pressure. In the capacitive pressure sensor, an electrode member includes: a measurement electrode fixed to an insulating positioning member and having an electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member for electrically connecting the measurement electrode and the signal electrode. Moreover, the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode.

Capacitive pressure sensor

A structure comprising: a base; a diaphragm; a peripheral wall member of which one end surface is attached to a circumferential edge part of the diaphragm and the other end surface is attached on the top surface of the base to form an internal space together with the base and the diaphragm; a protruding part that protrudes from the top surface of the base; and a communicatively connecting path that extends from a bottom surface side of the base toward the diaphragm, and communicatively connects the internal space and the outside to each other to flow fluid, wherein on an outer lateral surface of the protruding part, an opening is formed in a part intersecting with an inner lateral surface of the communicatively connecting path, and a part of a fore end inner surface of the communicatively connecting path is formed in the protruding part.

Growing community of inventors

Kyoto, Japan

Sotaro Kishida