Rion Company Ltd.

Kioxia Corporation

Sota Kondo

Kaoru Kondo

Takuya Tabuchi

Kazuna Bando

Eishi Shiobara

Hidekazu Hayashi

Hiroshi Tomita

Provided is a particle measurement device in which irradiation light emitted by a light source is expanded by an expander in a shape satisfying the requirements of a diffractive optical element, converted into parallel light, and made to enter the diffractive optical element. The diffractive optical element shapes the irradiation light entering therein into a flat top beam in which the cross section in the focal position thereof has an elongate rectangle shape. The intensity distribution of light can be made substantially uniform in a detection area formed by the shaped irradiation light.

Particle measuring device

According to one embodiment, a particle measuring method is disclosed. The method includes irradiating a detection liquid with light. The detection liquid contains methyl salicylate. The method further includes converting scattered light from the detection liquid into an electric signal by using photoelectric conversion after irradiating the detection liquid with the light. The method further includes performing a particle measurement on the detection liquid by using the electric signal.

Particle measuring method and detection liquid

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Tokyo, Japan

Sota Kondo