Fei Comapny

Sorin Lazar

Peter Christiaan Tiemeijer

Bert Henning Freitag

Rudolf Geurink

Erwin Fernand De Jong

Alexander Henstra

Bart Buijsse

Maarten Kuijper

Faysal Boughorbel

Eric Gerardus Theodoor Bosch

Gerard Nicolaas Anne Van Veen

Ivan Lazic

Kasim Sader

Stephan Kujawa

Jamie McCormack

Arthur Reinout Hartong

Eric Bosch

Erwin De Jong

An energy spectrometer with dynamic focus for a transmission electron microscope (TEM) is disclosed herein. An example energy spectrometer and TEM at least includes a charged particle column including a projection system arranged after a sample plane, the projection system is operated in a first configuration; an energy spectrometer coupled to the charged particle column to acquire one or more energy loss spectra. The energy spectrometer including a dispersive element, a bias tube, optics for magnifying the energy loss spectrum and for correcting aberrations, and a detector arranged conjugate to a spectrum plane of the energy spectrometer, wherein the energy spectrometer further includes an optical element electrically biased to refocus at least a portion of a spectrum onto the detector, and wherein the value of the electrical bias is at least partially based on the first configuration of the charged particle column.

Energy spectrometer with dynamic focus

A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising: specifically comprising:

EELS detection technique in an electron microscope

An imaging system for directing a flux of charged particles transmitted through a specimen onto a spectroscopic apparatus, wherein the flux is dispersed by a dispersing device into an energy-resolved array of spectral sub-beams propagating substantially parallel to a propagation axis. An adjustable aperture device defines an aperture in a path of the array so as to select a subset of the array to be admitted to a detector, which aperture is delimited in a dispersion direction perpendicular to the propagation axis to allow independent adjustment of both of: a width of the aperture parallel to the dispersion direction; and a position of a center of the aperture relative to the propagation axis.

Spectroscopy in a transmission charged-particle microscope

A method of performing spectroscopy in a Transmission Charged-Particle Microscope comprising:

Method of performing spectroscopy in a transmission charged-particle microscope

Examining a sample in a charged-particle microscope of a scanning transmission type includes:

Method of examining a sample in a charged-particle microscope

The invention provides multiple detectors that detect electrons that have passed through a sample. The detectors preferably detect electrons after the electrons have been passed through a prism that separates electrons according to their energies. Electrons in different energy ranges are then detected by different detectors, with preferably at least one of the detectors measuring the energy lost by the electrons as they pass through the sample. One embodiment of the invention provides EELS on core-loss electrons while simultaneously providing a bright-field STEM signal from low-loss electrons.

Simultaneous electron detection

A scanning confocal transmission electron microscope includes a descan deflector and a corrector below the sample. The microscope uses a detector that is preferably significantly larger than the resolution of the microscope and is positioned in the real image plane, which provides improved contrast, particularly for light elements.

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Eindhoven, Netherlands

Sorin Lazar