Open Water Internet Inc.

Kla Tencor Corporation

Kla Corporation

Soren Konecky

Edgar Emilio Morales Delgado

Mary Lou Jepsen

Lisheng Gao

Bjorn Brauer

Kenong Wu

Hucheng Lee

Robert M Danen

Junqing Huang

Caitlin Regan

Wilson Toy

Sarmishtha Satpathy

Albert P Heberle

Hosain Haghany

Coherent light (e.g., laser light) is emitted into a tissue sample through an optical fiber. The tissue sample diffuses the coherent light. Different blood flow quantities generate different coherent light interference patterns. An image of a coherent light interference pattern is captured with an image sensor coupled to an optical fiber. The speckle contrast of the image quantifies coherent light interference pattern. The speckle contrast is determined and is mapped to blood flow quantities using one or more data models. A quantity of blood flow is identified in a tissue sample at least partially based on the speckle contrast value of the captured image.

Optical imaging from light coherence

An ultrasound emitter launches an ultrasonic signal into a diffuse medium such as tissue. The diffuse medium is illuminated with an infrared illumination signal. activating an ultrasound emitter to launch an ultrasonic signal into a diffuse medium. An infrared reference beam is interfered with an infrared exit signal having an infrared wavelength that is the same as the infrared illumination signal. An infrared image is captured of the interference of the infrared reference beam with the infrared exit signal.

Optical imaging with unshifted reference beam

Laser light is emitted from a laser into a scattering layer. An ultrasound signal is emitted into a sample. A signal is generated with a light detector in response to a measurement beam of laser light exiting the light scattering layer into the light detector. At least a portion of the measurement beam formed between the laser and the light detector is wavelength-shifted by the ultrasound signal subsequent to the ultrasound signal propagating through the sample.

Imaging with scattering layer

A first signal is generated with a first light detector in response to an ultrasound signal encountering a first measurement beam. A second signal is generated with a second light detector in response to the ultrasound signal encountering a second measurement beam. The second measurement beam propagates through the sample and the first measurement beam propagates outside the sample.

Dual wavelength imaging and out of sample optical imaging

A semiconductor die is inspected using an optical microscope to generate a test image of the semiconductor die. A difference image between the test image of the semiconductor die and a reference image is derived. For each defect of a plurality of defects for the semiconductor die, a point-spread function is fit to the defect as indicated in the difference image and one or more dimensions of the fitted point-spread function are determined. Potential defects of interest in the plurality of defects are distinguished from nuisance defects, based at least in part on the one or more dimensions of the fitted point-spread function for respective defects of the plurality of defects.

Defect classification by fitting optical signals to a point-spread function

Methods and systems for determining boundaries of patterned features formed on a specimen from an unresolved image of the specimen are provided. One system includes computer subsystem(s) configured for comparing a difference image in which patterned feature(s) are unresolved to different simulated images. The different simulated images are generated by simulating difference images generated for the patterned feature(s) formed on the specimen with different perturbations, respectively. The computer subsystem(s) are configured for, based on the comparing, assigning an amplitude to each of the different perturbations. The computer subsystem(s) are further configured for determining one or more boundaries of the patterned feature(s) formed on the specimen by applying the different perturbations to one or more designed boundaries of the patterned feature(s) with the assigned amplitudes.

Aided image reconstruction

A method includes identifying a first set of a first care area with a first sensitivity threshold, the first care area associated with a first design of interest within a block of repeating cells in design data; identifying an additional set of an additional care area with an additional sensitivity threshold, the additional care area associated with an additional design of interest within the block of repeating cells in design data; identifying one or more defects within the first set of the first care areas in one or more images of a selected region of a sample based on the first sensitivity threshold; and identifying one or more defects within the additional set of the additional care areas in the one or more images of the selected region of the sample based on the additional sensitivity threshold.

System and method for defining care areas in repeating structures of design data

Methods and systems for determining if a defect detected on a specimen is a DOI (Defect of Interest) or a nuisance are provided. One system includes computer subsystem(s) configured for aligning output of an inspection subsystem for an area on a specimen to simulated output of the inspection subsystem for the area on the specimen and detecting a defect in the output for the area on the specimen. The computer subsystem(s) are also configured for determining a location of the defect in the output with respect to patterned features in the simulated output based on results of the detecting and aligning, determining a distance between the determined location of the defect and a known location of interest on the specimen, and determining if the defect is a DOI or a nuisance based on the determined distance.

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Alameda, CA, United States of America

Soren Konecky