Axcelis Technologies, Inc.

Sor Kham

Joseph Daniel Gillespie

Robert E Wayne

A workpiece gripping integrity device and method are provided having a charge-transfer sensing device configured to detect a change in charge associated with a gripper arm assembly based on a grip condition thereof. The charge-transfer sensing device can be configured to detect a change in capacitance between the gripper arm assembly and ground, wherein the change in capacitance is based on a grip condition of the gripper arm assembly associated with a plurality of grippers contacting the workpiece.

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Lowell, MA, United States of America

Sor Kham