Hahn-schickard-gesellschaft Fur Angewandte Forschung E.v.

Gs Elektromedizinische Gerate G. Stemple Gmbh

Hahn-schickard-gesellschaft Fuer Angewandte Forschung E.v.

Gs Elektromedizinische Geraete G. Stemple Gmbh

Sophie Billat

Frank Hedrich

Gerhard Kattinger

Achim Bittner

Alfons Dehé

Bernd Ehrbrecht

Rolf Bronner

Lenny Castellanos

Matthias Ashauer

Matthias Storz

Louis Sarlin

Ralf Bronner

In a first aspect, the invention relates to a photoacoustic gas sensor comprising a gas-fillable detection chamber and a reference chamber arranged laterally adjacent to each other and connected by a sensor channel. A sensor located at or in the sensor channel allows measurement of the photoacoustic signals. Both chambers are preferably located in a plane perpendicular to the emitted IR radiation of the IR emitter which is also comprised. The gas sensor is also formed from a multilayer substrate. In further aspects, the invention also relates to a method of manufacturing a gas sensor and a method of analyzing gas with a gas sensor.

MEMS-based photoacoustic cell

Gas sensor, including a membrane and a heating element arranged on the membrane between a first discontinuation area of the membrane and a second discontinuation area of the membrane. The first discontinuation area of the membrane includes at least one discontinuation of the membrane and the second discontinuation area of the membrane includes at least one discontinuation of the membrane. The gas sensor further includes a first temperature sensor structure arranged at least partially on the membrane on a side of the first discontinuation area of the membrane opposite to the heating element, and a second temperature sensor structure arranged at least partially on the membrane on a side of the second discontinuation area of the membrane opposite to the heating element.

Gas sensor, and method for operating the gas sensor

The invention relates to a sensor arrangement having a barometric pressure sensor and a thermal gas sensor, wherein the thermal gas sensor is arranged on the barometric pressure sensor or beside the barometric pressure sensor such that a gas-permeable measurement structure of the thermal gas sensor is arranged in front of a gas inlet opening of the barometric pressure sensor or in front of a pressure-sensitive surface of the barometric pressure sensor.

Gas sensor for determining the expiratory COcontent of respiratory air

Growing community of inventors

Villingen-Schwenningen, Germany

Sophie Billat