Samsung Electronics Co., Ltd.

Soon-Ju Choi

Chang-Hoon Lee

Yong-Jin Lee

Jong-Keun Jeon

Example embodiments provide tape structures including a base layer, a neutralizing layer and an adhesive layer. The base layer may support an object. The neutralizing layer may be arranged on the base layer. The neutralizing layer may be grounded to neutralize charges between the base layer and the object. The adhesive layer may be arranged on the neutralizing layer. The object may be attached to the adhesive layer. Example embodiments also provide methods of manufacturing the tape structures, methods of separating a wafer, and apparatuses for separating a wafer.

Growing community of inventors

Cheonan-si, South Korea

Soon-Ju Choi