Imec Vzw

Soon Aik Chew

Boon Teik Chan

Steven Demuynck

Zheng Tao

Naoto Horiguchi

Lars-Ake Ragnarsson

Efrain Altamirano Sanchez

Tom Schram

Min-Soo Kim

Hendrik F W Dekkers

Guillaume Boccardi

Dunja Radisic

The disclosed technology is related to a method that includes the formation of contact vias for contacting gate electrodes and source (S) or drain (D) electrodes of nano-sized semiconductor transistors formed on a semiconductor wafer. The electrodes are mutually parallel and provided with dielectric gate and S/D plugs on top of the electrodes, and the mutually parallel electrode/plug assemblies are separated by dielectric spacers. The formation of the vias takes place by two separate self-aligned etch processes, the Vint-A etch for forming one or more vias towards one or more S/D electrodes and the Vint-G etch for forming one or more vias towards one or more gate electrodes. According to the disclosed technology, a conformal layer is deposited on the wafer after the first self-aligned etch process, wherein the conformal layer is resistant to the second self-aligned etch process. The conformal layer thereby protects the first contact via during the second self-aligned etch.

Method for producing self-aligned gate and source/drain via connections for contacting a FET transistor

Example embodiments relate to methods for forming source/drain contacts. One embodiment includes a method for forming a source contact and a drain contact in a semiconductor structure. The method includes providing a semiconductor structure that includes a semiconductor active area having channel, source, and drain regions, a gate structure on the channel region, a gate plug on the gate structure, spacers lining side walls of the gate structure and of the gate plug, an etch stop layer covering the source and gain regions, a sacrificial material on the etch stop layer over the source and drain regions, and a masking structure that masks the source and drain regions. The method also includes forming gaps, removing the masking structure, filling the gaps, exposing the sacrificial material, removing the sacrificial material, removing the etch stop layer, and forming the source contact and the drain contact by depositing a conductive material.

Method for forming source/drain contacts

A method of forming a semiconductor device comprising horizontal nanowires is described. An example method involves providing a semiconductor structure comprising at least one fin, where the fin includes an alternating stack of layers of sacrificial material and nanowire material, and where the semiconductor structure includes a dummy gate partly covering the stack of layers. The method further involves at least partly removing the sacrificial material, in between the layers of nanowire material, next to the dummy gate thereby forming a void. Still further, the method involves providing spacer material within the void thereby forming an internal spacer. Yet still further the method involves removing the dummy gate, and selectively removing the sacrificial material in that part of the fin which was covered by the dummy gate, thereby releasing the nanowires. The internal spacer is provided before removing the dummy gate and the sacrificial material to release the nanowires.

Method of forming internal spacer for nanowires

The disclosed technology generally relates a semiconductor device comprising transistors, and more particularly to a semiconductor device comprising transistors each having a gate stack with a different effective work function, and methods of fabricating such a device. In one aspect, the method of fabricating the semiconductor comprises providing at least two channel regions in the substrate and providing a dielectric layer on the substrate. The method additionally includes forming a plurality of gate regions by providing openings in the dielectric layer. The method further includes providing a gate dielectric layer in the openings and providing on the gate dielectric layer of each of the gate regions a barrier layer stack having different thickness along the different gate regions.

Method for manufacturing a semiconductor device comprising transistors each having a different effective work function

A method for manufacturing a field effect transistor of a non-planar type, comprising providing a substrate having an initially planar front main surface, and providing shallow trench isolation structures in the substrate on the front surface, thereby defining a plurality of fin structures in the substrate between the shallow trench isolation structures. Top surfaces of the shallow trench isolation structures and the fin structures abut on a common planar surface, and sidewalls of the fin structures are fully concealed by the shallow trench isolation structures. The method also includes forming a dummy gate structure over a central portion of the plurality of fin structures on the common planar surface, forming dielectric spacer structures around the dummy gate structure, and removing the dummy gate structure, thereby leaving a gate trench defined by the dielectric spacer structures. Further, the method includes removing an upper portion of at least two shallow trench isolation structures to expose at least a portion of the sidewalls of the fin structures within the gate trench, and forming a final gate stack in the gate trench.

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Heverlee, Belgium

Soon Aik Chew