Semes Co., Ltd.

Soomin Hwang

Jaeseung Go

Jinyoung Choi

Dong Woo Kim

A method and system for treating a substrate are provided. The system includes a coating unit, a pre/post-exposure treatment unit, and a developing unit. Each of the units includes a load port and an index module. The pre/post-exposure treatment unit includes first and second modules that are arranged in different layers. The first module performs a process for coating a protective layer on the wafer before an exposure process. The second module performs a process for cleaning the wafer and a post-exposure bake process after the exposure process.

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Hwaseong-si, South Korea

Soomin Hwang